Resources:

Data Sheet

Ideal Applications Include:

Semiconductor, Solar panel manufacturing

 

Specifications:

Size Range:

6mm – 25mm (1/4″ – 1″)

Wetted Material:

PTFE (natural)

Actuator:

Air-to-Spring NC/NO, Air-to-Air, Manual

End Connections:

Flare, Pillar™, NPT

Pressure Rating:

72.5psi

  • Fully customizable manifold and combo valve configurations
  • Special diaphragm eliminates dead space and particle generation
  • Diaphragm design allows the manifold to be fully flushed between processes
  • Inlet port can fully recirculate for high purity or branch requirements
  • High cycle life ensures reliable performance in critical applications