Dymatrix® Specialty Integrated Valves (AVSIV)
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Manifold Valves

Dymatrix® Specialty Integrated Valves (AVSIV)

Application specific solutions engineered to meet unique design challenges. In collaboration with end-users, Asahi can integrate any combination of Dymatrix® components onto a single hybrid valve body. These multi-function valves provide a compact solution, eliminating multiple connections and possible leak points.

Resources:

Data Sheet

Ideal Applications Include:

CMP, Electrochemical Deposition – ECD, Photolithography, Chemical Delivery Systems, Spin Coating, Wet Bench Cleaning

Specifications:

Materials of Construction:

Wetted Valve Body (PTFE), Actuators (PFA or PVDF)

Flow Rate:

Various

Flow Configuration:

Various

Actuation:

Manual, Pneumatic, Hybrid (Multi-turn Push-to-lock)

Connection Types:

Flare, S300, Super Pillar, Tube, Rc, Flowell 20 and 60 series

  • Compact Monolithic Design
  • Eliminate dead legs
  • Ultra-high purity, corrosion resistant PTFE and PFA wetted components
  • Full customized to application specific needs
  • Reduced connections and possible leak points
  • Lower installation costs
  • Configurable mounting orientation
  • O-Rings: FKM, EPDM, Viflon F, Kalrez®
  • Fluoropolymer coated stainless steel hardware